发明名称 SEMICONDUCTOR DEVICE AND ITS LAYOUT METHOD
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor device and its layout method that has enhanced yield and superior reliability in a manufacturing process. SOLUTION: In the layout method for a semiconductor device, an aluminum wiring 16 for forming the metallic layer of a first layer is connected to a gate being formed by a polysilicon film 14 on a gate oxide film 12, at the same time is connected to an n+-type diffused layer for forming a P-N junction 20 between a substrate 11 of a p-well, and discharges electric charges generated in the plasma etching process for the aluminum wiring 16 at the P-N junction 20.
申请公布号 JP2000124311(A) 申请公布日期 2000.04.28
申请号 JP19980298483 申请日期 1998.10.20
申请人 KAWASAKI STEEL CORP 发明人 YONEDA MASATO
分类号 H01L23/52;H01L21/3205;H01L21/768;(IPC1-7):H01L21/768;H01L21/320 主分类号 H01L23/52
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