| 摘要 |
PROBLEM TO BE SOLVED: To achieve an accurate measurement of a non-through microscopic diameter hole and moreover without restriction from the material of work and the roughness of a measuring surface. SOLUTION: In this method, a wall surface having a hole 2 to be measured is irradiated with a luminous flux from an irradiation optical system 11 and reflected light on the wall surface is caught as observation image to measure the shape of the wall surface to be measured from positional information on the surface of the observation image. In this case, a transparent microscopic ball body 3 is attached to the hole 2 to be measured and the return light reflected parallel with incident light as caused by the ball body 3 is caught as observation image to determine a spatial position of the microscopic ball body 3 by an observation optical system 21. Thus, the shape of the hole 2 to be measured is determined form the spatial position information.
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