| 摘要 |
PROBLEM TO BE SOLVED: To provide a sector secondary ion mass spectrometer capable of providing depth resolution as much as that of a Q-pole one while making the best use of the advantage of the sector having a low detection limit. SOLUTION: Equipotential surfaces 5 between a sample 1 and an extraction electrode 2 of a secondary ion optical system are corrected to be parallel with the extraction electrode 2 as they approaches the extraction electrode 2, for instance, a tilt is formed on a surface of a sample holder 15 on which the sample is mounted, and a member 3 to limit the exposed surface of the sample 1 nearly to the analyzed region of the sample 1 with respect to the extraction electrode 2 of the secondary ion optical system arranged opposite to the sample holder 15 is arranged in the vicinity of the tilt surface, and thereby, a path of the secondary ions 17 are controlled to approach the center axis of the secondary ion optical system.
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