SUBSTRATE-TREATING APPARATUS AND METHOD FOR PREDICTING FAILURES THEREOF

摘要

PROBLEM TO BE SOLVED: To prevent failures caused during the operation of a substrate-treating apparatus to improve the productivity by predicting the failure time of drive components. SOLUTION: The number of driving times or driving time of a drive component of a unit constituting a substrate-treating apparatus is stored as a fatigue degree parameter in a fatigue degree accumulating memory 11. Life parameters of individual driving components are stored in a life memory 15. A failure predicting arithmetic unit 14 computes the predicted failure times of the driving components, based on the life parameters and fatigue degree parameter accumulated values. The computed result is displayed on a display 22 and, in computing the predicted failure time, an error history memory 13 and an error-related table 16 are referred to take into account the involvement of the driving components to errors.