| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the conversion efficiency and productivity of a solar battery, by forming fine scribing lines at a high speed by forming a nozzle which blows out a gas flow containing fine particles in a narrow and long shape, at the time of removing a cadmium telluride film in a prescribed pattern by bringing the gas flow into collision with the cadmium telluride film. SOLUTION: While a substrate 11 to be worked and a narrow and long nozzle 9 are moved positioned at a height of 30 mm from the surface of a protective material 6, a gas flow containing fine particles is perpendicularly blown upon the substrate 11 from the nozzle 9. The part of a cadmium telluride(CdTe) film exposed in an opening 10 is shaved off in a prescribed pattern by bringing the fine particles into collision with the part by blowing the gas flow upon the protective material 6. The fine particles are composed of fine calcium carbonate particles having particle sizes of about 20μm, and blown out at a rate of 200 g/min by using a compressed air as a carrier gas. Thereafter, the waste of the blown fine particles and the protective material 6 composed of urethane rubber are simultaneously removed by dipping the substrate 11 in ion exchange water, and the substrate is taken out of the water and dried. Then split CdTe films are formed.</p> |
