发明名称 LASER LENGTH MEASURING MACHINE
摘要 PROBLEM TO BE SOLVED: To enhance the sensitivity of measurement of a travel of a moving substance by reflecting leser beams split into two, by two reflecting means from reverse directions, and returning them to the same direction respectively and causing them to interfere with each other. SOLUTION: A polarizing beam splitter 3 splits a laser beam 2 into first (s-polarized) and second (p-polarized) laser beams. The first laser beam is reflected by rectangular prisms 41, 42, and is emitted in parallel with the direction of movement of a moving substance 90 and in the right direction, and enters a corner cube 31. This reflected beam proceeds in a direction reverse to the incidence, is reflected by the polarizing beam splitter 3, passes a polarizing plate 6 thereafter, and enters a photodetector 7. The second laser beam is reflected by rectangular prisms 43-45, and enters a corner cube 32 from the right direction. The reflected beam strikes the photodetector 7 and both laser beams interfere with each other. In this case the corner cubes 31, 32 move byΔL byΔL movement of the moving substance 90 also. The optical path length of the first (second) laser beam becomes shorter (longer) by 2ΔL, and an optical path length difference of 4ΔL is generated and the sensitivity becomes twice as high as in the condentional art.
申请公布号 JP2000121322(A) 申请公布日期 2000.04.28
申请号 JP19980293971 申请日期 1998.10.15
申请人 TOKYO SEIMITSU CO LTD 发明人 OSAWA NOBUYUKI
分类号 G01B9/02;G01B11/00;G01B11/04;(IPC1-7):G01B11/04 主分类号 G01B9/02
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