发明名称 APPARATUS FOR MEASURING OPTICAL SYSTEM ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for measuring an optical system element which can simultaneously carry out optical observation and high frequency observation. SOLUTION: A probe insertion opening 32 of a test pin 30 is formed sideways to a light source 7. Accordingly, a probe 11 is connected without requiring a large space between the light source 7 and a measurement substrate 1, and the light source 7 is arranged via a predetermined gap above the measurement substrate 1, so that an element 20 to be measured can be optically observed. The test pin is constituted as an insertion type test pin with a signal terminal and a grounding terminal formed integrally, and therefore the element 20 can be observed at high frequency simultaneously with the optical observation.
申请公布号 JP2000121494(A) 申请公布日期 2000.04.28
申请号 JP19980296696 申请日期 1998.10.19
申请人 SONY CORP 发明人 TANIYAMA TOKUYUKI
分类号 G01M11/00;(IPC1-7):G01M11/00 主分类号 G01M11/00
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