| 摘要 |
PROBLEM TO BE SOLVED: To inspect the existence of small leak in negative pressure side and positive pressure side by impressing pressure from negative pressure source and positive pressure source to a work capsule and a master capsule and judging whether or not a pressure difference generate between them. SOLUTION: By utilizing negative pressure generated by a negative pressure source 15, a small leak test of the negative pressure side can be done. By injecting air having positive pressure accumulated in a tank 17 by certain amount through controlling valves 5A and 5B and throttles S1 and S2 into a work capsule 6A and a master capsule 6B, a large leak test can be performed. After completing a large leak test, if no differential pressure is generated between the capsules 6A and 6B while measuring time elapses, then even a small leak in positive side does not exist. If a small leak does not exist in a work 8, no pressure difference generates between the capsules 6A and 6B. When a small leak exists in the work 8, pressure difference generates between the capsules 6A and 6B with time elapsing and a differential pressure inspector 7 outputs electric signal, when a specific value is exceeded, a judging device 10 judges as 'a leak exists'.
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