| 摘要 |
PROBLEM TO BE SOLVED: To provide a mass flow controller whose temperature control is easy and whose reliability is high. SOLUTION: In this mass flow controller 1, a control device 11 by which a control signal used to make a liquid-phase material 17 flow out at a prescribed flow rate is supplied to a flow rate control valve 10 is provided, and the flow rate control valve 10 which can control a flow rate by providing a liquid drop output structure used to output the flowing-into liquid-phase material 17 as a liquid drop is provided. Then, while the number of liquid drops which are outputted at one time or their flow rate is adjusted, the flow rate is controlled.
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