发明名称 APPARATUS FOR MOUNTING FINE BALLS
摘要 PROBLEM TO BE SOLVED: To easily remove extra fine balls, without increasing the cost. SOLUTION: This apparatus comprises a ball suction device 10, having a suction jig 2 having a plurality of holes for sucking and moving fine balls by a suction unit B21, a ball feeder 14 for transferring the fine balls to the suction jig 2, a ball distributor 24 having a tube 19, which is coupled with vibrating ultrasonic vibrator 18a and supported above an arranging jig 22 of the ball feeder 14, such that a standing wave having concentric nodes is generated in the tube 19 to move the fine balls collected like a concentric band in parallel on the arranging jig 22, thereby distributing them into arranging holes of the arranging jig 22, and an oscillator 45 for oscillating the tube 19 to remove extra fine balls on the arranging jig 22 by ultrasonic waves 3 which are emitted from the lower end face of the tube 19.
申请公布号 JP2000124247(A) 申请公布日期 2000.04.28
申请号 JP19980294144 申请日期 1998.10.15
申请人 ANDO ELECTRIC CO LTD 发明人 FUJIMURA NAOYUKI
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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