RADIATION-SENSITIVE RESIN COMPOSITION

摘要

A radiation-sensitive resin composition excellent in heat resistance, which comprises an alkali-soluble resin prepared by the condensation of a methylolbisphenol compound represented by general formula (I) either alone or with a phenol, a crosslinking agent and an acid generator, wherein R1 to R4 are each hydrogen, C1-C3 alkyl or -CH2OH, provided at least one of R1 to R4 is -CH2OH; and R5 and R6 are each hydrogen or C1-C3 alkyl.