Acousto-optical exposure with high write speed involves dividing beam from light source into two sub-beams and combining sub-beams after passing through beam path branching sections

摘要

The method involves dividing the beam (2) from the light source (1) into two sub-beams (5,6) and combining the sub-beams after passing through beam path branching sections. The sub-beams are polarized with respect to each other and independently modulated in the branching sections. The separately modulated sub-beams in the summation beam (16) are dynamically deflected (18), separated into polarization directions and fed to the target object with a defined alignment and a modulation sequence adapted to the write direction. An Independent claim is also included for an arrangement for two-channel modulatable exposure of a target object using a single light source, preferably a laser.