发明名称 IMPROVED METHOD AND APPARATUS FOR FILM-THICKNESS MEASUREMENTS
摘要 <p>Described is a method and apparatus for measuring a property of a sample by: irradiating a portion of the sample with an excitation pattern having at least one spatial phase and spatial period; diffracting a portion of a probe beam off a surface of the sample; detecting the diffracted portion of the probe beam with an optical detector to generate a light-induced signal; and processing the light-induced signals to determine a property of the sample. By adjusting the spatial phase of the excitation pattern and repeating the irradiating, diffracting and detecting steps to generate at least one additional light-induced signal the method is considerably improved.</p>
申请公布号 WO2000023790(A1) 申请公布日期 2000.04.27
申请号 EP1999008231 申请日期 1999.10.21
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