| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent troubles in which the inside is decompressed, when a user removes the cover of a sealed wafer carrier and the outside air is sucked in and contaminates a wafer. SOLUTION: A wafer carrier 100, whose cover 103 for closing the opening in such a way that it is fit in the opening of the wafer carrier body 2, is equipped with a keyhole 9 and fixes or removes the cover 10 to or from the wafer carrier body 2 by an operation after insertion of the key 110 into the keyhole 9, the cover 103 is equipped with a vent 104 which pierces through deep into the wafer carrier at the back of the keyhole 9, and the vent 104 is normally closed by a valve 105, and the valve 105 is made so as to open, when the outside atmospheric pressure becomes high. When a user removes the cover 103, the tip of the keyhole 110 aligns with the vent and connects it substantially airtightly, and the key 110 is made into the shape of a nozzle which jets out cleaning gas from its tip, thus the inside pressure can be raised by flowing the cleaning gas into it.</p> |
