SURFACE ACOUSTIC WAVE DEVICE

摘要

A surface acoustic wave device (1) comprising a substrate (2) composed of quartz, a pair of comb-tooth-shaped electrodes (3) composed of aluminum layers, electrode pads (4) and a pair of lattice-shaped reflectors (5) composed of the same material as that of the electrodes (3). An aluminum layer constituting an electrode (3) has a twin crystal structure, in which, with plane (-11-1) and plane (1-11) of aluminum used as grain boundaries of a twin crystal, a crystal grain involving plane (-111) and plane (002) and a crystal grain involving plane (1-1-1) and plane (00-2) are in a twin crystal relation. Plane {111} of an aluminum layer is oriented at an inclination of 8 DEG with plane {010} of quartz constituting the substrate (2).