摘要 |
<p>Described is a scavenger for reducing the concentration of an impurity in a gas, comprising an inorganic support (20) having disposed thereon an active agent selected from the group consisting of BxHy, SixHy, AsxHy, PxHy, GexHy and mixtures thereof wherein x is one, two or three, and y is zero, one, two, three, four, five or six. Also described are methods and apparatusesfor making and for using the scavenger.</p> |