| 摘要 |
<p>A solid immersion lens (19) integrated on a flexible support (11) such as a cantilever or membrane is described, together with a method of forming the integrated structure. A cantilever (11) comprises an integral tip (17) having a solid immersion lens (19) and a tip (18), such as a pyramidical or connical tip, which can have a metal coating (21) to form a small aperture (16). In use, a collimated light beam (23) can be focused onto the solid immersion lens (19) with an objective lens (24).</p> |
