发明名称 Surface-Skimming-Bulk-Welle-Substrat, und diese enthaltende Vorrichtung
摘要 A piezoelectric substrate (120) and a method for preparing same. The method includes steps of (i) providing a boule of piezoelectric material, (ii) orienting the boule to Euler angles chosen to provide a boundary condition matched to a partially-metallized surface and (iii) sawing the boule into at least a first slice (120) having first and second surfaces, at least one of the first and second surfaces comprising a planar surface. The method desirably but not essentially further includes steps of (iv) polishing at least one of the first and second surfaces to provide a substantially planar polished surface, (v) disposing a layer of metal on the at least one of the first and second surfaces and (vi) patterning the layer of metal to provide at least one interdigitated pattern (105, 110) comprising an acoustic wave transducer (105, 110), the acoustic wave transducer (105, 110) providing the boundary condition matched to a partially-metallized surface. <IMAGE>
申请公布号 DE69607264(D1) 申请公布日期 2000.04.27
申请号 DE1996607264 申请日期 1996.07.25
申请人 CTS CORP., ELKHART 发明人 PENUNURI, DAVID
分类号 H04R17/00;H01L41/09;H01L41/22;H03H3/08;H03H9/02;H03H9/17;H03H9/25;H04R31/00;(IPC1-7):H03H9/02 主分类号 H04R17/00
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