METHOD FOR FORMING VACUUM IN A SOURCE CHAMBER OF ION IMPLANTER

摘要

PURPOSE: A vacuum formation method in a source chamber of ion implanter is provided to increase a lifetime of a turbo pump by preventing the turbo pump from polluting. CONSTITUTION: A method comprises the steps of making vacuum state a turbo pump(104)and a source chamber(100) vacuum state by using a roughing pump(102), operating the turbo pump(104) when the degree of vacuum in the source chamber(100) reach to a predetermined level. At this time, when RPM of the turbo pump(104) reach to a desired level, the turbo pump(104) and the roughing pump(102) are simultaneously operated by opening a valve(E) connected between the turbo pump(102) and the source chamber(100).