WAFER TRANSFERRING APPARATUS OF SPINNER FOR PREVENTING BREAKAGE OF WAFER

摘要

PURPOSE: A wafer transferring apparatus of a spinner is to improve a shape of a wafer supporter, thereby preventing a breaking and a scratching of a wafer when transferring the wafer. CONSTITUTION: A wafer transferring apparatus comprises a fixing portion(100) for connecting with a robot arm, a wafer supporter(104) connected with the fixing portion and directly contacted with a rear face of a wafer so as to support the wafer, and a connecting portion(102) connecting the fixing portion with the wafer supporter. The wafer supporter is wider than a plane surface of a flat zone of the wafer and has a protrusion(106) for reducing a surface contacted with the wafer. Therefore, the contacting surface with the wafer is minimized by the protrusion, thereby restraining a generating of particles. Although the flat zone is exactly overlapped with the wafer supporter, since the width of the wafer supporter is wider than the flat zone, the wafer is prevented from going through or being scratched.