| 摘要 |
PURPOSE: A circulation system of process solution in a wet station is to filter whole process solution of an inner bath, shorten a time taken in the filtering, and prevent the use of unnecessary chemicals. CONSTITUTION: A circulation system comprises: a chemical bath consisting of an inner bath (11) in which a process solution(13) is contained and an outer bath(12) in which the inner bath is installed and in which a filtered process solution(14) is contained; a filter for filtering the process solution; a conduit(16) connected to a pump(17) and respective elements, for performing a compulsory exhaustion and supply. The pump exhausts the process solution from the inner bath and supplies the exhausted process solution to the outer bath. The process solution is used in the inner bath, is filtered in a first filter(15), purged, again supplied though the conduit to a second filter(18,19), filtered in the second filter and then supplied to the outer bath.
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