EVAPORATOR FOR VACUUM DEPOSITION FACILITY

摘要

PURPOSE: Evaporator for vacuum deposition facility change evaporation rate quickly, maintain for long process time without stopping moving of facility by minimizing pollution of evaporated metal. CONSTITUTION: Evaporator for vacuum deposition facility comprises: vaporizer(3) is heated with electric heater by fitting up crucible to evaporate inputted metal; tubular nozzle head(1) with hollow body is formed with nozzle(2) to discharge metal vapor on cylindrical jacket surface. And said vaporizer(3) have vaporizer casing(4) to form crucible by binding to nozzle head(1).