| 摘要 |
PURPOSE: A spin unit of a developer is to form a good quality of pattern by progressing a wafer development under a stable environment. CONSTITUTION: A spin unit of developer comprises an upper cover(12) with a cover gripe(11) of the spin unit suspended therefrom, a right cover(13), a left cover(14), a wafer entrance(15) for entering a wafer, a wafer exit(16) for exiting a wafer, a bowl(17) with the wafer to be developed placed thereon, and an interior(22) for progressing a wafer development process. An entrance switch door(18) is provided at the wafer entrance. An entrance sensor(19) is provided at the front of the entrance switch door. An exit switch door(20) is provided at the wafer exit. An exit sensor(21) is provided at the front of the exit switch door.
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