发明名称 Liquid flow workpiece cassette washing apparatus
摘要 A plurality of washing sections 6, 7, and 8 for individually washing different portions of a cassette body 111 in a washing liquid 3 using washing brushes 10, 14, and 20, respectively, are sequentially formed in a groove-shaped washing vessel 2 through which the washing liquid 3 flows continuously. A plurality of transfer means 26, 27, and 28 for chucking the cassette body 111 being washed to bring it into contact with the washing brushes 10, 14, and 20, respectively, and for transferring the cassette body 111 that has been washed to the washing section upstream are provided so as to correspond to the washing sections 6, 7, and 8, respectively.
申请公布号 US6052855(A) 申请公布日期 2000.04.25
申请号 US19980170277 申请日期 1998.10.13
申请人 SPEEDFAM CLEAN SYSTEMS CO., LTD. 发明人 TERUI, YOSHINOBU
分类号 B08B1/04;B08B3/04;B08B3/12;B08B7/04;B08B11/02;H01L21/304;(IPC1-7):A47L15/00 主分类号 B08B1/04
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