发明名称 |
COMBINED PREANNEALING/OXIDATION METHOD USING RAPID THERMAL PROCESSING |
摘要 |
PURPOSE: A method is provided to provide processes for manufacturing a silicon wafer by simultaneously forming a thickness of a given mark and an oxide layer of a denuded zone. CONSTITUTION: A single-crystal silicon wafer undergoes temperatures which go up to 1200°C from the atmosphere temperature and then return to the atmosphere temperature for a 10 second holding time period. An oxide layer thickness and a denuded zone depth are controlled to desired mark values by controlling the temperatures and the annealing time in a high pressure accessed to about 740T atmosphere pressure and in a 100% oxygen, to thereby simultaneously obtain a thickness of a given mark and a depth of an oxide layer of the denude zone.
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申请公布号 |
KR20000022803(A) |
申请公布日期 |
2000.04.25 |
申请号 |
KR19990036463 |
申请日期 |
1999.08.31 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
THEBS HELMUTHOREST;SHUREMS MARTIN;GERTNER THOMAS |
分类号 |
H01L21/322;H01L21/26;H01L21/316;H01L21/324;(IPC1-7):H01L21/324 |
主分类号 |
H01L21/322 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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