APPARATUS FOR CONTROLLING ARC VOLTAGE OF MEDIUM IMPLANTER

摘要

PURPOSE: An arc voltage control apparatus of medium implanter is provided to improve beam efficiency and to lengthen the life of a filament by supplying different arc voltage for ionizing process gas by processes. CONSTITUTION: An arc voltage control apparatus of medium implanter comprises: a switch (SW) consisting in a remote console(1) controlling entire operation of a medium implanter and determining an up/down state of the arc voltage; a resistor controller(4) having resistance being varied according to an up/down position of the switch and generating voltages of different level; a voltage/frequency converter(5) converting the voltage into frequency; an arc free amplifier(8) amplifying the voltage to a predetermined level; and an arc power supply(9) supplying voltage corresponding to the amplified voltage as arc voltage for ionizing process gas.