| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a new vacuum treating device. SOLUTION: An additional isolation valve 24 is incorporated in the vacuum treating device 10 to increase the service life of a mechanical pump 28 in the device, to decrease the maintenance cost and the interrupting time, to obstruct the back flow of particles and to reduce the danger to workers attending to the maintenance. The device has a treating chamber 12 provided with at least a boat 14, a reserve line valve 16 connected to the boat 14 and a vacuum manifold 26 communicating with the reserve valve with fluid. The mechanical pump 28 is connected to the vacuum manifold to evacuate the content in the treating chamber. The isolation valve is connected between the reserve line valve and the vacuum manifold and works integrally or mainly integrally with the reserve line valve.</p> |
