发明名称 SEMICONDUCTOR IC DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A semiconductor IC device and a manufacturing method thereof are provided to enhance the reliability of connection and to simplify process. CONSTITUTION: A semiconductor IC device comprises first wiring lines(23-26), a first insulation film(38), a second insulation film(39), a second wiring line(54), a first conductive layer, a third insulation film, a power supply wiring line and a second conductive layer. The first wiring line is formed on a MISFET(metal insulator semiconductor field effect transistor) for selecting a memory cell. The first insulation film is formed on the first wiring line. The second insulation film is formed on a capacitance element(C) for accumulating information. The second wiring line is formed on the second insulation film. The first conductive layer is formed within a first through(64) hole formed in the first and second insulation films. The power supply wiring line supply prescribed power potential to an upper electrode(47) formed on the capacitance element.
申请公布号 KR20000022861(A) 申请公布日期 2000.04.25
申请号 KR19990037064 申请日期 1999.09.02
申请人 HITACHI.LTD. 发明人 NAKAMURA YOSHITAKA;HIRASAWA MASAYOSHI;ASANO ISAMU;TAMARU TSUYOSHI;YAMADA SATORU;KAWAKITA KEIJOU;SEKIGUCHO TOSHIHIRO;TADAKI YOSHITAKA;HUMUDA TAKUYA
分类号 H01L21/02;H01L21/316;H01L21/768;H01L21/8242;H01L23/532;H01L27/108 主分类号 H01L21/02
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