QUARTZ BOAT OF SEMICONDUCTOR DIFFUSION FACILITY

摘要

PURPOSE: A quartz boat for loading a plurality of wafers is provided to prevent a deformation of the quartz boat during thermal treatments under high temperature by overlapped fixing slit bars and fixed bars. CONSTITUTION: A quartz boat(1) comprises a plurality of slit bars(2) horizontally arranged each other, a plurality of fixed bars(4) for fixing the slit bars(2) to be arranged circular shaped, and a cylindrical bar(5) formed at bottom of the fixing bars(4) and fixed to be horizontally with the slit bars(2). The plurality of slit bars(2) and the plurality of fixed bars(4) are fixed by overlapping each other.