| 摘要 |
PURPOSE: An inker for detecting an operation error during an inking process is to prevent a bad chip which is not inked from being moved to a next process, by monitoring and stoping the bad chip. CONSTITUTION: An inker capable of detecting an operation error during an inking process comprises an inker solenoid head(100), an inker solenoid(104) connected to the inker solenoid head, a fish line(106) provided under the inker solenoid to move up and down, an ink reservoir(108) provided in contact with the fish line, an inker tip(110) for performing the inking of the wafer by movement of the inker solenoid head and the fish line, and a sensor for detecting the movement of the inker solenoid head. The inker solenoid is connected with a signal line(102) capable of receiving a signal from exterior to operate the solenoid.
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