| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear guide device for a static pressure air bearing capable of establishing precise movement of a moving body without providing any guide member such as a guide rail, being embodied in a this form, decreasing the number of part, items, and suppressing the cost. SOLUTION: This linear guide device for a static pressure air bearing is equipped with a table 3 as a constituent element of a moving body movable on a base table 1 in the guiding direction, air bearing parts 5, 6a, 6b to support and guide the table 3, and suction force giving parts 5 and 8 to suck table 3 to the base table 1, wherein the air bearing part 5 to make horizontal direction supporting is arranged on the side of the table 3, and the suction force giving part 7 is located on the side faces of the table 3 and base table 1.
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