发明名称 LIQUID CRYSTAL ELEMENT, LCD PANEL AND METHOD FOR MAKING THE SAME
摘要 PURPOSE: A method for making LCD panel reduces the number of processes and the number of exposing processes, enhances a productivity, and lowers a production cost, prevents an inferior transistor being related to an etching stopper part, and enhances a production yield of LCD panel and a product quality. CONSTITUTION: A method for making LCD panel deposits a gate insulation layer(6), a channel layer(8), and etching stopper layer(10) on a transmissive substrate(2) on which a gate electrode(4) is formed. By a photo lithography method, the method exposes the gate electrode(4) as a shading mask from a back side of the substrate(2). In this state, the method develops a resist, and forms etching stopper(14) by etching the etching stopper layer(10). A source/drain layer(16) and a residual part of the etching stopper(14) are etched all. Thereby, the method reduces the number of processes and the number of exposing processes, enhances a productivity, and lowers a production cost, prevents an inferior transistor being related to an etching stopper part, and enhances a production yield of LCD panel and a product quality.
申请公布号 KR20000023524(A) 申请公布日期 2000.04.25
申请号 KR19990041720 申请日期 1999.09.29
申请人 INTERNATIONAL BUSINESS MACHINES CORP.;TOSHIBA KABUSHIKI KAISHA 发明人 TOKUHIRO OSAMU;UEDA HIROYUKI;MACHIDA MASAHIKO
分类号 G02F1/1343;G02F1/136;G02F1/1368;H01L21/336;H01L29/49;H01L29/786;(IPC1-7):G02F1/134 主分类号 G02F1/1343
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