APPARATUS FOR POSITION DETECTING HAVING PLURAL DETECTING BLOCK AND EXPOSURE APPARATUS

摘要

PURPOSE: A position detecting apparatus and exposure apparatus are provided to exactly detect plane position of the subject of measurement regardless of the surface state of the subject. CONSTITUTION: A position detecting apparatus comprises: at least two detecting blocks(301-306); a selecting block(SW) selecting at least one detecting block among the detecting blocks; and measurement apparatus(32) measuring position of an object plane to a normal line direction using the detecting block selected by the selecting block(SW). Each detecting block(301-306) comprises an electrode, and the measurement apparatus(32) measures space between the electrode and the object plane by applying an electric signal comprising an AC component to the electrode of the selected detecting block.