FOCUSING METHOD OF LENS FOR EXPOSURE APPARATUS

摘要

PURPOSE: A focusing method of a lens is to focus a central part of the lens as well as a peripheral part thereof. CONSTITUTION: A focusing method comprises steps of: placing and arranging a focusing wafer (20) on a wafer stage(10); and irradiating on the focusing wafer a light passing through a reticle and a lens(30) to expose focusing patterns. The lens is focused by determining whether the focusing patterns are precisely exposed on the focusing wafer. Further, focusing patterns passing through both a central part and a peripheral part of the lens are exposed on the focusing wafer, thereby focusing the lens.