| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an anti-fogging film which is durable in anti-fogging effect and without deteriorating the optical property, and an anti-staining film which is excellent in durability and without deteriorating the reflection preventive effect. SOLUTION: A thin film manufacturing method includes a process in which a first target mainly consisting of titanium and a second target consisting mainly of silicon are installed in a vacuum chamber, a first sputtering process in which a substance of either of the first target or the second target is deposited on a substrate by a sputtering method, a second sputtering method in which a substance of the other target of the first target or the second target is deposited on the substrate and a mixture film forming process in which the substance deposited on the substrate is oxidized to form a thin film of the mixture consisting mainly of silicon oxide and titanium oxide after the first and second sputtering processes are completed. |
