PRESSURE-BASED MASS FLOW CONTROLLER

摘要

PURPOSE: A pressure-based mass flow controller is provided to exactly control the gas feed from various liquid and solid precursors. CONSTITUTION: A pressure-based mass flow controller(10) includes an inlet(12) and an outlet(14). A unit for making a channel(16) in a pipe shape is provided between the inlet and the outlet to connect them. The channel keeps its temperature uniform by being covered with a temperature control unit. The temperature control unit includes an adiabatic device(48), one and more temperature sensors(38) to work a heater for a feed-back device to detect the temperature of the channel and to keep the temperature of the channel as high as the fixed temperature.