| 摘要 |
PURPOSE: A polybenzoxazole resin and precursor thereof are provided which are excellent in all of thermal characteristics, electrical characteristics, physical characteristics and mechanical characteristics in use for semiconductors. CONSTITUTION: Polybenzoxazole precursors represented by the general formula 1 and polybenzoxazole resins represented by the general formula 4 are described. In the formula 1 and 4, n denotes an integer of 2 to 1000 and X denotes a structure selected from those represented by the following formula 2; In the formula 2, Y denotes a structure selected from -C(CF3)2-, -C(CH3)2-, -SO2-, and -O-, and the hydrogen atom(s) on the benzene ring in these structures may be substituted with at least one group selected from the groups consisting of methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, t-butyl group, fluorine atom and trifluoromethyl group. |
