| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a composition, which comprises a polyoxoacid derivative (salt) and water and which is able to highly planarize a surface of a body to be abraded at a high speed. SOLUTION: A polyoxoacid hetero compound is preferred as the polyoxoacid derivative, and from the standpoint of the improvement in abrasion speed or the reduction in surface roughness, aluminohexamolybdic acid, manganononamolybdic acid, selododecamolybdic acid, cobalthexamolybdic acid and manganohexatungstic acid are preferred. As the salt of the polyoxoacid derivative, it is preferred to use a sodium salt, a potassium salt and an ammonium salt. It is also preferred that the content of the polyoxoacid derivative (salt) ranges 0.05 to 20 wt.%, and the content of water ranges 50 to 99.95 wt.%. If necessary, an abrasive material may be added in an amount of 0.01 to 40 pts.wt. per 100 pts.wt. of the abrasive liquid composition. The abrasive material preferably includesα- orγ-alumina particles.</p> |
