| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer for a CVD device capable of easily recovering the residues of a liq. raw material which have not been heated and vaporized and left at the inside of the vaporizer. SOLUTION: A vaporizer 1 is provided with a funnel part 3 composed of a taper-shaped bottom part 3a and a straight tube part 3b so as to be continued to an internal volume part 2, a residue extruding rod 4 freely capable of extracing and inserting and a rotatable unbrella-shaped raw material guide 5 provided in the upper direction of the residue extruding rod 4. A liq. raw material 22 fed from a liq. raw material feeding part 20 dropped onto the rotating raw material guide part 5 and is heated and vaporized, and the residues which have not been vaporized and left are collected on the straight tube part 3b. The collected residues are extruded to the lower end of the straight tube part 3b by the residue extruding rod 4, by which the recover of the residues can easily be executed.
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