| 摘要 |
PROBLEM TO BE SOLVED: To provide a CVD device capable of reducing clogging caused by the precipitation of the raw material in a duct line on the upstream side of a vaporizer and solidification of a gaseous starting material at the inside of the vaporizer. SOLUTION: A liq. raw material 3 discharged to the side of a main duct line 9 by a pump 5 and pressurized by a pressure raising means 1 is fed to a vaporizer 2 in such a manner that pulsation is suppressed by a damper 10. Moreover, carrier gas in a carrier gas feeding part 7 is heated by a carrier gas heating means 8 and is fed into the vaporizer 2. The volatilization of the liq. raw material 3 in the main duct line 9 is suppressed by being pressurized, and, since the carrier gas to be fed has been heated at the inside of the vaporizer 2, the vaporized gaseous starting material is not solidified, by which the clogging caused by the solidification of the raw material at the insides of the main duct line 9 and vaporizer 2 can be reduced.
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