Method of improving texture of metal films in semiconductor integrated circuits

摘要

A method is provided for improving the texture of a metal interconnect (32) in a semiconductor device (10). A first layer of titanium (24), a layer of titanium nitride (26), a second layer of titanium (28), and a metal film (30) are sequentially formed over an oxide layer (12). The second titanium layer (28) is preferably out 10-20 nm thick. Because the metal film (30) is formed over the second titanium layer (28), any metal interconnect (32) that is formed as a part of the metal film (30) has a strong (111) crystalline orientation. Furthermore, because the second titanium layer (28) is relatively thin, the metal film (30) and metal interconnect (32) are not completely transformed into a metal compound having a high electrical resistance.