AIR SPEED ADJUSTER FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An air speed adjuster for manufacturing a semiconductor device is provided to control an air flow degree with a uniform numerical value by installing a measuring unit having a pressure gauge and a displayer. CONSTITUTION: An air leading tube connector(310) and an air exhaust tube connector(350) are formed at both sides of a tube body(100). A speed adjuster(200) adjusts an amount of an air which flows into the tube body(100) and adjusts a flow speed of the air. A measuring unit(400) is connected to the speed adjuster(200) and measures the flow speed of the air. The measuring unit(400) displays a pressure measured in a pressure gauge on a displayer in a real time. The displayer displays the flow speed of the air to display an amount of the flow air.