发明名称 Horizontal injector for oxidation furnace
摘要 A horizontal oxidation furnace injector comprising an inner tube and an outer tube. The inner tube has an inner tube inlet and an inner tube outlet. The inner tube inlet is used for receiving a first gas and the inner tube outlet is used for outputting the first gas. The outer tube has a branch tube and an outer tube outlet. The branch tube further includes an outer tube inlet. The outer tube inlet is used for receiving a second gas, and the outer tube outlet is used for outputting the secord gas. Furthermore, the outer tube outlet and the inner tube outlet are at the same end. In addition, part of the inner tube is enclosed by the outer tube of the injector while the remainder of the inner tube is exposed, and the inner tube has no bends.
申请公布号 US6053430(A) 申请公布日期 2000.04.25
申请号 US19980072319 申请日期 1998.05.04
申请人 UNITED MICROELECTRONICS CORP. 发明人 WU, CHUN-SHEN;TAI, YU-SHAN;LIU, TIEN-JUI
分类号 F23D14/22;F23D14/32;(IPC1-7):F23D11/10 主分类号 F23D14/22
代理机构 代理人
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