METHOD FOR FORMING BARRIER METAL LAYER OF METAL CONTACT

摘要

PURPOSE: A method for forming a barrier metal layer of a metal contact is provided to form and improve an in-situ barrier metal layer for a short time, without additional equipment. CONSTITUTION: A method for forming a barrier metal layer comprising the steps of: depositing a TiN layer on a contact hole for a metal contact; and thermally treating the resultant and filling in gaps of the TiN layer by depositing a Ti layer on the TiN layer. The thermal treating and filling step are performed in a deposition chamber which is same with a chamber used at the TiN layer depositing step, or the thermal treating and filling step are performed in a chamber which is different from the chamber used at the TiN layer depositing step without vacuum break, with in-situ process.