| 摘要 |
PROBLEM TO BE SOLVED: To quickly detach a conductive ball from a suction hole without generating dislocation by setting the conditions of an air blow to a suction head performed in releasing the suction of the conductive ball based on the pressure detection result in a suction head. SOLUTION: A conductive ball 1 is landed on a pad 12. Secondly, a first valve 25 is closed, vacuum suction by a suction part 24 is stopped, a second valve 29 is opened to feed air from a high-pressure air supply part 28 to a space 22, and the pressure in the space 22 is raised. Air blow conditions are so controlled that a positive pressure part is not shown in a pressure pattern in the space 22 detected by a pressure sensor 31 and the pressure rising time reaching the atmospheric pressure does not exceed a prescribed time. Thirdly, when the pressure in the space 22 reaches the atmospheric pressure, a suction head 21 is raised and the conductive ball 1 is detached from the suction hole 23 to be left on the pad 12.
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