发明名称 LINEAR ACTUATOR AND STAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To improve the thrust performance of a linear actuator while the heat transfer to the circumference is reduced. SOLUTION: A linear motor (linear actuator) 24 constituted of an armature unit 24A and a magnetic pole unit 24B uses flat coils 84Ai and 84Bi (i=1-N) the coils incorporated in an armature unit 24A arranged in the magnetic field generated from the magnetic pole unit 24B. The coils 84Ai and 84Bi are supported by bar-like supporting members 86A1 and 86A2 and 86B1 and 86B2, respectively. Therefore, the thrust performance of the linear actuator 24 can be improved and, at the same time, the heat transfer to the surrounding environment and peripheral members can be reduced.
申请公布号 JP2000116104(A) 申请公布日期 2000.04.21
申请号 JP19980279502 申请日期 1998.10.01
申请人 NIKON CORP 发明人 TOTSU MASAHIRO
分类号 H02K41/03;(IPC1-7):H02K41/03 主分类号 H02K41/03
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