发明名称 ADHESIVE FILM AND SEMICONDUCTOR DEVICE EMPLOYING THE SAME
摘要 PROBLEM TO BE SOLVED: To prevent undue projection of adhesive form adhesive layers formed on the opposite sides of an insulation film by setting the melting viscosity of the adhesive on the semiconductor chip side higher than that of the adhesive on the external wired joint member side at the hot press temperature thereby eliminating voids from the adhesion interface between the joint member and the semiconductor chip. SOLUTION: An adhesive has a semi-cured thermosetting resin layer 5 formed on the opposite sides of a core material, i.e., a heat resistant thermoplastic film 4, where the adhesive on the semiconductor chip side is cured more than the adhesive on the external wired joint member side so that the melting viscosity will be different on the opposite sides. In order to fill the irregularities formed on the surface of the external wired joint member due to a wiring layer or lands at hot press, melt viscosity of the adhesive on the external wired joint member side is preferably set in the range of 1 to 5×104 [P] at the hot press temperature. The melting viscosity of the adhesive on the semiconductor chip side is preferably set in the range of 2 to 8×104 [P] at the hot press temperature and is set higher than that of the adhesive on the external wired joint member side.
申请公布号 JP2000114280(A) 申请公布日期 2000.04.21
申请号 JP19980276343 申请日期 1998.09.30
申请人 HITACHI CHEM CO LTD 发明人 TOMIYAMA TAKEO;KANEDA AIZO;YASUDA MASAAKI;HATAKEYAMA KEIICHI;HARA HISAKO;NOMURA YOSHIHIRO;HOSOKAWA YOICHI
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
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