发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To shorten a process of a semiconductor device for manufacturing a logic circuit and a non-volatile memory on a single substrate by contriving a write voltage and an erase voltage applied to the non-volatile memory to reduce the required breakdown voltage of the non-volatile memory to the same level as that of the logic circuit. SOLUTION: A deep first well 42 of a second conductive type is selectively formed on a semiconductor substrate 41 of a first conductive type. A third conductive well 43-2 of a first conductive type if formed in a place other than the place of the semiconductor substrate 41 where the first well 42 is formed. Here, a second well 43-1 and the third well 43-2 are formed at the same time by reducing the required breakdown voltage of a memory cell with some contrivance to the operating voltage of a non-volatile memory. Since the well 43-2 for logic circuit and a well 43-3 for the non-volatile memory are formed at the same time, a manufacturing process of a semiconductor device having the logic circuit and the non-volatile memory on the single substrate can be shortened.</p>
申请公布号 JP2000114498(A) 申请公布日期 2000.04.21
申请号 JP19980277862 申请日期 1998.09.30
申请人 NEC CORP 发明人 KOKUBU KUNIO
分类号 G11C16/04;H01L21/8238;H01L21/8247;H01L27/092;H01L27/10;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115;H01L21/823 主分类号 G11C16/04
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