| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to detect positional deviation of a substrate through simple circuitry, by detecting two end positions of the substrate, and calculating the amount of deviation of the substrate from a preset reference position in a transportation path. SOLUTION: When a substrate 10 is transported, two end positions of the substrate 10 are detected by an end position detecting means 12. If the substrate 10 is deviated from a reference position when transported, end positionsθ11 andθ12 are detected by the end position detecting means 12. When the substrate 10 is kept in the reference position when transported, end positionsθ21 andθ22 are detected by the end position detecting means 12. Therefore, it is detected whether the substrate 10 is deviated form the reference position by comparing the end positionsθ11 andθ12 of the substrate 10 detected when the substrate 10 is moved with the end positionsθ21 andθ22, stored in a position detecting apparatus, when the substrate 10 is kept in the reference position and transported. Thus any positional deviation of the substrate can be detected through simple circuitry.</p> |
