| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the defect of a fan-in line of a specified width or less on a ceramic substrate to make the fan-in line stable by polishing the surface of the ceramic substrate to provide a specified roughness or less before coating a paste. SOLUTION: Using a polisher having a polishing material, the surface of an Al2O3-SiO2-B2O3-PbO glass ceramic substrate is polished to provide a surface roughness Ra of 0.5 or less, a photosensitive conductor paste is coated on the polished substrate surface by the screen printing and dried, then the conductor paste is exposed to UV rays through a photo mask of a wiring circuit pattern, a developer liq. is sprayed on the exposed surface to dissolve unexposed parts, thereby developing it, and it is baked at 855 deg.C for 5 min. Thus, a fan-in line of 40μm or less wide is stably formed on the ceramic substrate without defects.
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